JPH0544084Y2 - - Google Patents

Info

Publication number
JPH0544084Y2
JPH0544084Y2 JP1989007534U JP753489U JPH0544084Y2 JP H0544084 Y2 JPH0544084 Y2 JP H0544084Y2 JP 1989007534 U JP1989007534 U JP 1989007534U JP 753489 U JP753489 U JP 753489U JP H0544084 Y2 JPH0544084 Y2 JP H0544084Y2
Authority
JP
Japan
Prior art keywords
box
ceramic body
powder
ceramic
dust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989007534U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0299608U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989007534U priority Critical patent/JPH0544084Y2/ja
Publication of JPH0299608U publication Critical patent/JPH0299608U/ja
Application granted granted Critical
Publication of JPH0544084Y2 publication Critical patent/JPH0544084Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Brushes (AREA)
  • Devices For Post-Treatments, Processing, Supply, Discharge, And Other Processes (AREA)
JP1989007534U 1989-01-25 1989-01-25 Expired - Lifetime JPH0544084Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989007534U JPH0544084Y2 (en]) 1989-01-25 1989-01-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989007534U JPH0544084Y2 (en]) 1989-01-25 1989-01-25

Publications (2)

Publication Number Publication Date
JPH0299608U JPH0299608U (en]) 1990-08-08
JPH0544084Y2 true JPH0544084Y2 (en]) 1993-11-09

Family

ID=31212621

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989007534U Expired - Lifetime JPH0544084Y2 (en]) 1989-01-25 1989-01-25

Country Status (1)

Country Link
JP (1) JPH0544084Y2 (en])

Also Published As

Publication number Publication date
JPH0299608U (en]) 1990-08-08

Similar Documents

Publication Publication Date Title
US4141180A (en) Polishing apparatus
US4193226A (en) Polishing apparatus
EP1120191A3 (en) Wafer processing machine
CA2170164A1 (en) Apparatus and method for renovating playing surfaces
AU668128B2 (en) Method for micro-cleaning a support and apparatus for implementing same
JPH0544084Y2 (en])
US20020062843A1 (en) Cleaning and handling methods of electronic component and cleaning apparatus thereof
TWI397143B (zh) Automatic cleaning of the nozzle device and methods
GB2122481A (en) Vacuum floor polisher
JP2512015B2 (ja) 基板の洗浄装置
JPS60240129A (ja) スクラブ洗浄装置
JPH0446873Y2 (en])
JP3550180B2 (ja) ウェハの搬送方法および搬送装置
JPH04203888A (ja) セラミックス焼成用治具及びその製造方法
JP2023028360A (ja) 加工装置、及びチャックテーブルの保持面の洗浄方法
JP4037511B2 (ja) ウェーハの研磨装置及びそのシステム
JPH04283075A (ja) サンドブラスト装置
JPS61219570A (ja) 半導体装置の製造方法
JPH08213352A (ja) ウェーハ洗浄装置
CN219131862U (zh) 一种钢结构表面打磨除锈装置
JP2020131367A (ja) 研削装置
JPH07302827A (ja) 半導体ウエハ搬送装置
JPH0534108Y2 (en])
JPH087524Y2 (ja) 磁気ヘッド用クリーニングテープ
JPH1026480A (ja) 超小物セラミック成形品の焼成用セッターへの詰め込み方法及びその装置